The Theory, Fabrication, and Characterization of Nano/Microelectromechanical Systems (NEMS/MEMS)

(ME 461E / ME 561E / ECE 519 / NSMS 519) - Fall 2009


Course description:

This is a laboratory course on the physical theory, design, analysis, fabrication, and characterization of NEMS/MEMS. The main objective of this course is the fabrication of important types of nano/microstructures used in NEMS/MEMS devices. Therefore, the emphasis is on techniques used in the fabrication of NEMS/MEMS. Special emphasis will be given to the bulk and surface micromachining processes. Basic techniques will be discussed separately and then sequenced in order to build-up these commonly used processes.


Teaching assistants:


Syllabus:

CourseSyllabus.pdf


Homeworks:

Homeworks
Due date
September 9, 2009
September 16, 2009
September 23, 2009
September 30, 2009
October 7, 2009
October 14, 2009
October 21, 2009
October 28, 2009
November , 2009

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